CENTRE OF NANOTECHNOLOGIES, UNDER THE AEGIS OF THE ROMANIAN ACADEMY

laboratory in the National Institute for Research and Development in Microtechnology (IMT-Bucharest)
Street Erou Iancu Nicolae, no. 32B 077190, Bucharest, Romania
http://www.imt.ro, Phone: +4021.4908412 ext. 33,Fax: +4021.4908238


Home | Research directions | The research team | Presentation of the research programmes | Research infrastructure | Results | e-Courses and scientific meetings organization | International cooperations | Awards |

     Centre of Nanotechnologies has access to the IMT-facilities, as follows:
Clean room (class 100); Photolithogra-phic mask shop fabrication; Exposure and Double- side mask alignment machine for 3 and 4 inch wafers; Spinner for photosensitive materials deposition; Equipments for silicon microfabrication: CVD and PVD echipments; Thermal processes furnaces, Plasma Etching machine; Thermostatic chemical stoves with ultrasonic stirring, 6 pieces; Laminar flow bench, with UV lamp for handling of biological probes Spectroscopic Ellipsometer in the UV-VIS range; Atomic force microscope.
Other facilities in Centre of Nanotechnologies are: Keithley model 6487-picoammeter /voltage source; Porous silicon power supply; Trace LabVoltaLab 50 (PST050 & VoltaMaster 4); Thermostat stove for biological materials treatment; Transmission- reflexion- fluorescence microscope with images acquisition and measurement system.