Fig. 10. 4-level Fresnel lens- Masks M1 si M2 (detail) superposed (obtained in Opti-BPM
with a special script, than imported and processed in CleWin).
2.2. Development of new processes
New processed based on the combination optical lithography- wet or RIE etching have been developed. Also EBL for the fabrication of optical components with feature size in the range of tens-hundreds of nanometers have been used for the first time in Romania.
Also replication techniques for fabrication of low cost polymeric microprism for biosensors were experimented for the first time in Romania.
To obtain SPR-based biosensors protocols for protein imobilization in sensing layers were develpoed.
2.3. Characterization tools
The characterization have been performed wising new equipment (SEM, elipsometry, white light interferometer, optical and confocal microscops).and special set-up (e.g. for focal length measurement, dependence of the sensor response on analite concentration, lens charactristics, etc.).