Development of the project
Workpakage WP 2.2 - Technological development
set-up the nanolithography equipment.
set-up the nanolithography technological processes and find the minimal dimensions of the elements which can be configured by this processes.
development of the etching processes through the nanolithographic mask.
development of optical mask alignment for processes of micro and nanolithography,
development of processes for multilevel nanostructures
fabrication of diffractive optic elements and micro/nano diffraction gratings.
development of the processes necessary for 1D and 2D photonic crystals;
lithografic processes; data bases with process parameters (EBL+RIE); demonstrative structures
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