MINAFAB Processing equipments


Tool Name Spinner

Manufacturer SUS MICROTEK                                        

Tool responsible and Process responsible Adrian Albu

Status and tool description 

2” – 4”; fragments; Rotation angular speed: “low” to 6000 rpm, programmable 10 steps, programmable ramping. Thickness of deposited layer: 1000Å- several µm




Application scientist: eng. Adrian Albu, adrian.albu@imt.ro



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Last update: February 27, 2011