SPINNER
Tool Name Spinner Manufacturer SUS MICROTEK Tool responsible Adrian Albu Process responsible Adrian Albu Status and tool description 2” – 4”; fragments Rotation angular speed: “low” to 6000 rpm, programmable 10 steps, programmable ramping Thickness of deposited layer: 1000Å- several µm
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| Application scientist: eng. Adrian Albu, adrian.albu@imt.ro |
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Last update: February 19, 2009 |
