Simulation Results
The FEM-based simulations were performed by CoventorWare 2006 software tools. In the simulations we have used a simplified structure of the microgrippers
The mesh parameters used are as the following:
Analysis type: nonlinear, coupled electro-thermo-mechanical
Fig. 1. FEM simulation of the closing arms of the microgripper, when a voltage of 0.2V is applied (scale in micrometers)
Fig. 2. FEM simulation of the temperatures in the arms of the microgripper when we apply 0.2V (K)
Fig. 3. The remaining distance between the ends of free arms when a voltage is applied: first microgripper it is just with one layer of metal and second microgripper with two layers of gold down and upper SU-8 layer