About the project

Titlu proiect: Novel technologies based on micromachining and nano-processing of GaN/Si, for advanced microwave and photonic devices
Program: IDEAS, PCE
Financing: UEFISCDI
Project code : PN-II-ID-PCE-2011-3-0513
Contract No: 203/2011

Period: 2011-2014;

Project manager: DR. ALEXANDRU MULLER (IMT Bucharest) alexandru[dot]muller[at]imt[dot]ro

The aim of this project consists in the development of new technologies, based on micromachining and nanoprocessing of GaN/Si, in order to manufacture innovative devices, having performances representing state of the art: (i) novel GaN membrane supported UV photodetectors, with IDT (interdigitated transducers) having fingers and interdigits about 100 nm wide, devoted to applications where backside illumination is necessary, (ii) GaN based SAW structures working in a frequency range reaching the X band, usingĀ  IDTs with digits and interdigits 100-150 nm wide, (iii) the integration of a nano-processed SAW structure with a membrane supported UV photodetector in a novel SAW assisted detector structure.

The technologies and characterization methods which will be developed will contribute to overcome the physical limits of today's technologies related to the manufacturing of GaN based GHz SAW devices and very thin GaN membrane supported UV photodetectors. The project embraces research, development and the proof-of-concept laboratory-based demonstration. The proposed demonstrator-devices, are directly related to applications and give a potential economic impact to the project.