CURRICULUM VITAE 

Buton.jpg (695 bytes)  First name: ELENA

Buton.jpg (695 bytes)  Surname : MANEA

Buton.jpg (695 bytes)  Date and place of birth: august 21, 1954, Arad

Buton.jpg (695 bytes)  Education:

wpe5.jpg (680 bytes)  1978, M.Sc." University of Bucharest , Faculty of Physics",
wpe5.jpg (680 bytes)  1998, Ph.D. in "Solid State Physics Thesis" "University of Bucharest , Faculty of Physics",

Buton.jpg (695 bytes)  Professional experience:

Blue_Arrow25D.gif (140 bytes)   20 years experience in silicon planar technology including:

wpe5.jpg (680 bytes)  photolithography and diffusion processes for MOS-CI, thin film deposition (e-beam and sputtering) for wafer up 4".
wpe5.jpg (680 bytes)  elaboration of processes and vehicles for testing the performances of the photolithography and diffusion processes
wpe5.jpg (680 bytes)  optimized of technological process to obtain new devices: for CMOS Al gate IC, polysilicon CMOS for gate array,
thin films silicon solar cells,
wpe5.jpg (680 bytes)  anizotropic etching of crystalline silicon in alcaline solutions
wpe5.jpg (680 bytes)  define the thickness of the silicon membrane by boron diffusion processes for MOMS,

Buton.jpg (695 bytes)  Career:

wpe5.jpg (680 bytes)  1978 -1983: Institute of Research for Electronic Components (ICCE) for Microelectronica, Bucharest, MOS I.C. Wafer Fabrication Division,
Process engineer (chemical cleaning, thermal and photolithography process for I.C. MOS technologies)
wpe5.jpg (680 bytes)  1983 -1993 : Microelectronica, Bucharest, MOS I.C. Wafer Fabrication Division, Head of MOS I.C. Wafer Fabrication Division
wpe5.jpg (680 bytes)  1993 -1999:National R&D Institute for Microtechnology, Bucharest, MOS I.C. Wafer Fabrication Division, senior scientific researcher and process integration engineer for CMOS technologies and then Head of Wafer Fabrication Laboratory
wpe5.jpg (680 bytes)  1999 -2000: Microelectronica SA, Bucharest, MOS I.C. Wafer Fabrication Division, Ph.D, senior scientific researcher Head of MOS I.C. Wafer Fabrication Division
wpe5.jpg (680 bytes)  2000 – to present: National R&D Institute for Microtechnology, Bucharest, Wafer Fabrication Laboratory, Ph.D, senior scientific researcher, Head of Wafer Fabrication Laboratory

Buton.jpg (695 bytes)  Stages abroad:

wpe5.jpg (680 bytes)  England, Fell, 1984
wpe5.jpg (680 bytes)  "Politehnica" University, Bucharest (Chemistry Engineering Faculty) cours, Analytical Methods of Thin Films, Surfaces and Interfaces Characterisation, 1994 -1995

Buton.jpg (695 bytes)  Present position: Ph.D, senior scientific researcher

Buton.jpg (695 bytes)  Research interests:

wpe5.jpg (680 bytes)  Technological engineering for microsystems and microsensors technologies
wpe5.jpg (680 bytes)  Research new materiale and processes for microstructured glass for biomedical application

Buton.jpg (695 bytes)  Past and current projects:

wpe5.jpg (680 bytes)  2002 – 2004: Romanian National R&D Program MATNANTECH ‘’Matricial networks of alveoles, supporting cells for investigation, testing and diagnosis"; source of founding: budget; project manager

wpe5.jpg (680 bytes)  collaborator to:

wpeB.jpg (687 bytes)  2000-2003: Romanian National R&D Program RELANSIN 2000 "Photodiodes micromatrix for optical fiber communications"
source of founding: budget and co-financing
wpeB.jpg (687 bytes)  2000-2003: Romanian National R&D Program RELANSIN "Technology Glucose sensor an amperometric",
source of founding: budget and co-financing
wpeB.jpg (687 bytes)  2001-2004 : Romanian National R&D Program MATNANTECH " a and ß integrated on silicon sensors for environmental natural contamination" source of founding: budget and co-financing
wpeB.jpg (687 bytes)  2001-2003: Romanian National R&D Program MATNANTECH " Microelectronics applications for Laser ablation technologies"
source of founding: budget and co-financing
wpeB.jpg (687 bytes)  2002-2004: Romanian National R&D Program MATNANTECH" Advanced MCM technologies for RF applications"
source of founding: budget and co-financing

Buton.jpg (695 bytes)  Main scientific publications:

Blue_Arrow25D.gif (140 bytes)  Scientific Papers in journals:`

wpe5.jpg (680 bytes)  "Optical improved structure of polycrystalline silicon-based thin-film solar cell", Elena Budianu, Munizer Purica, Elena Manea, Emil Rusu, Raluca Gavrila, Mihai Danila, Solar Energy Materials & Solar Cells, Vol. 72, 2002, pp 223-229
wpe5.jpg (680 bytes)  "Experiments for microphotonic components fabrication using Si <1 1 1> eching techniques", Dana Cristea, Munizer Purica, Elena Manea, Viorel Avramescu, Sensor & Actuators A, Vol. 99, 2002, pp. 92-97
wpe5.jpg (680 bytes)  "Experiments for Inorganic-Organic Hybrid sol-gel films for micro- and nano-photonics, A. Jitaru, M. Gartner, M. Zaharescu, D. Cristea, Elena Manea, to be published in Materials Science

Blue_Arrow25D.gif (140 bytes)  Scientific Papers in Conferences Proccedings:

wpe5.jpg (680 bytes)  "Analysis of the Migration of the Defects Induced by High-Dose Ion Implantation of Arsenic in Silicon", I. Cernica, E. Manea, C. Dunare, 23-th Edition of International Semiconductor Conference, Sinaia, oct. 10-14, Proseedings 2000, pp.267-271.
wpe5.jpg (680 bytes)  "Residual Stress Analysis in Thin Membranes Obtained by Boron Diffusion Processes", E. Manea, I. Cernica, V. Dolocan, R. Müller, 23-th Edition of International Semiconductor Conference, Sinaia, oct. 10-14, Proseedings 2000, pp. 471-475
wpe5.jpg (680 bytes)  "SOI Materials for MOEMS Obtained by Silicon Direct Bonding Technique", C. Dunare, I. Cernica, D. Popescu, D. Cristea, M. Modreanu, E. Manea, 23-th Edition of International Semiconductor Conference, Sinaia, oct. 10-14, Proseedings 2000, pp 531-535
wpe5.jpg (680 bytes)  "Experiments for Microphotonic Components Fabrication using Si<111> Etching Techniques", D. Cristea, P. Obreja, M. Purica, E. Manea, V. Avramescu, THE European Material Conference E-MRS 2001 Spring Meeting, Strasbourg (France), June 5-8, 2001, Book of Abstracts p.J-9, J/P08
wpe5.jpg (680 bytes)  "Silicon Membranes as Sensing Elements For MOEMS Applications: Fabrication/ Characterization", R. Muller, E. Manea, P. Obreja, THE European Material Conference E-MRS 2001 Spring Meeting, Strasbourg (France), June 5-8, 2001, Book of Abstracts p. J-10, J/P11
wpe5.jpg (680 bytes)  "Optical Improved Structure of Polycristalline Silicon Based Thin Film Solar Cell", E. Budianu, M. Purica, E. Manea, THE European Material Conference E-MRS 2001 Spring Meeting, Strasbourg (France), June 5-8, 2001, Book of Abstracts, p.E-4, E/P-A7
wpe5.jpg (680 bytes)  "Desing and Optimization of a MSM Photodetector based on Poly-Si Layer", E. Budianu, M. Purica, E. Manea, M. Danila, R. Gavrila, I. Oprea, 24-th Edition of International Semiconductor Conference, Sinaia, oct. 9-13, Proseedings 2001, pp. 181-184
wpe5.jpg (680 bytes)  "Thin Membranes obtained by Surface Micromachining- Preliminary Study for a Fabry-Perot Interferometer", R. Muller, E. Manea, M. Kusko, 24-th Edition of International Semiconductor Conference, Sinaia, oct. 9-13, Proseedings 2001, pp. 193-196
wpe5.jpg (680 bytes)  "Etching Processes of Si <111> Wafers for Fabrication of Microphotonic Components", D. Cristea, M. Purica, E. Manea, P. Obreja, 24-th Edition of International Semiconductor Conference, Sinaia, oct. 9-13, Proseedings 2001, pp. 197- 200
wpe5.jpg (680 bytes)  "New Bulk Micromachining Technique for Silicon Membrane Fabricotion in MOEMS Applications", E. Manea, I. Cenica, R. Muller, ARMY p. 29 - 34
wpe5.jpg (680 bytes)  "New Silicon Waveguides fabrication process based on the anisotropic etching of Si <111> - oriented wafers", D. Cristea, P. Obreja, E. Manea, E-MRS Spring Meeting 2002, Strasbourg, France, June 2002,
wpe5.jpg (680 bytes)  "Sol-gel thin films for integrated optics and optical gas sensors on silicon" , M. Crisan, M. Gartner, D. Cristea, M. Zaharescu, E. Manea, E-MRS Spring Meeting 2002, Strasbourg, France, June 2002,
wpe5.jpg (680 bytes)  "Experiments for inorganic–organig hybrid sol–gel based photonic components", A. Jitaru, M. Gartner, M. Zaharescu, D. Cristea, E. Manea, E-MRS Spring Meeting 2002, Strasbourg, France, June 2002,
wpe5.jpg (680 bytes)  "Sacrificial and structural layers used in surface micromachined Fabry-Perot", R. Muller, D. Syridis, E. Manea, M. Kusko, D. Apostol, V. Damian, E-MRS Spring Meeting 2002, Strasbourg, France, June 2002,
wpe5.jpg (680 bytes)  "New technique for Si-based microphotonic components fabrication",D. Cristea, E. Manea, ICO19-Optics for the Quality of Life, 25-30 August, Florence, Italy, pp. 647 - 648
wpe5.jpg (680 bytes)  "Structural Investigation of LPCVD Polly-Silicon Layers used in Surface Micromachining", M. Danila, E. Manea, R. Muller, R. Gavrila, 25-th Edition of International Semiconductor Conference, Sinaia, oct. 8-12, Proseedings 2002, pp. 91 - 94
wpe5.jpg (680 bytes)  "Mixed Valence Compounds for Integrated Optics", M. Bulinski, V. Kuncser, C. Plapcianu, D. Cristea, E. Manea, P. Obreja, S. Krautwald, H. Franke, F.E. Wagner, G. Filoti, 25-th Edition of International Semiconductor Conference, Sinaia, oct. 8-12, Proseedings 2002, pp.203 - 206
wpe5.jpg (680 bytes)  " Blue /Ultraviolet Sensitive Detector on <100> Silicon Membrane",M. Purica, E. Budianu, E. Manea, 25-th Edition of International Semiconductor Conference, Sinaia, oct. 8-12, Proseedings 2002, pp.211 - 214
wpe5.jpg (680 bytes)  " Polysilicon Thin Layers for Photovoltaic Applications", E. Budianu, M. Purica, E. Rusu, E. Manea, R. Gavrila, 25-th Edition of International Semiconductor Conference, Sinaia, oct. 8-12, Proseedings 2002, pp.215 - 218
wpe5.jpg (680 bytes)  "Spectroscopic Ellipsometry Characterisation of Solid Phase Crystallisation of Silicon Thin Films obtained by LPCVD", M. Modreanu, M. Gartner, C. Cobianu, E. Manea, 25-th Edition of International Semiconductor Conference, Sinaia, oct. 8-12, Proseedings 2002, pp.287 - 290
wpe5.jpg (680 bytes)  "A Method for Electrical Yied Improvement for High Speed Polysilicon CMOS Processed Wafers", I. Cernica, E. Manea, A. Popescu, 25-th Edition of International Semiconductor Conference, Sinaia, oct. 8-12, Proseedings 2002, pp.339 – 342
wpe5.jpg (680 bytes)  "Poly-Si thin layers for high speed photodetectors", E. Budianu, M. Purica, E. Manea, M. Danila, R. Gavrila, Proseedings of the International Symposium on Electron Devices for Microwave and Optoelectronic Applications EDMO 2002, Manchester, Nov.2002, pp.202 -204
wpe5.jpg (680 bytes)  "Sol-gel preparation of thin films for integrated optics", M. Crisan, M. Gartner, D. Cristea, M. Zaharescu, L.Predoana, E. Manea, M. Caldararu, Proseedings of the International Symposium on Electron Devices for Microwave and Optoelectronic Applications EDMO 2002, Manchester,
Nov.2002, pp.205 -210
wpe5.jpg (680 bytes)  "Si-based microphotonic components fabrication using anisotropic etching of <111>-oriented silicon wafers", D. Cristea, E. Manea, The International Conference of Advanced Topics in Optoelectronics Micro & Nanotechnologies (ATOM 2002), Bucharest, Nov. 21-23, Conference Abstracts 2002, p.32
wpe5.jpg (680 bytes)  "Integrated Fabry-Perot microcavity based on surface micromachining processes", R. Muller, D. Syvridis, M. Kusko, D. Cristea, D. Apostol, V. Damian, M. Bercu, E. Manea, The International Conference of Advanced Topics in Optoelectronics Micro & Nanotechnologies (ATOM 2002), Bucharest, Nov. 21-23, Conference Abstracts 2002, p.40

Buton.jpg (695 bytes)  Patents:

wpe5.jpg (680 bytes)  Manufacturing Technology for CMOS Integrated Circuits (Nr. patent:115392 B1/ 28.01.2000)
wpe5.jpg (680 bytes)  Optimized Manufacturing Technique for MIS CMOS Integrated Circuits (Nr. patent:116691 / 28.12.2001)
wpe5.jpg (680 bytes)  Short Cycle Manufacturing Technology for Gate Arrays CMOS Integrated (Nr. patent:116692 / 28.12.2001)

Buton.jpg (695 bytes)  Member of professional associations: IEEE Electron Device Society (1996- 2000)

Buton.jpg (695 bytes)  Additional information:

wpe5.jpg (680 bytes)  2000- Diploma and medal of Distinction in Romanian Research ( given by Romanian National Agency for Science, Technology and Innovation)
wpe5.jpg (680 bytes)  2002- Prize at National Semiconductor Conference, paper "Desing and Optimization of a MSM Photodetector based on Poly-Si Layer", E. Budianu, M. Purica, E. Manea, M. Danila, R. Gavrila, I. Oprea

Buton.jpg (695 bytes)  Foreign languages: english, french

Buton.jpg (695 bytes)  Contact information:

wpe5.jpg (680 bytes)  Elenam@imt.ro
wpe5.jpg (680 bytes)  Phone:+ 40-1-4908412 / 36, fax: +40-1-4908238

wpe4.jpg (1933 bytes)