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I. BINEVA, R. VOICU, A. DINESCU, R. GAVRILA, R. MULLER, D. ESINENCO, B.
BUCUR, M. DIACONU, L. G. RADU
SiO2
Microcantilevers Designed for Biosensing: Experiments and
Simulations
Abstract.
A
cantilever array
with dimensions
of the
beams 150×80×1.2 µm
has been fabricated. Three
different
biochemical compounds were deposited and the
cantilever was investigated using scanning electron microscopy (SEM).
Simulations using CoventorWare have been made and stresses have been calculated
between 12 and 60.4 MPa.
Keywords: cantilever,
biosensing, transducers, stress, simulations, MEMS.
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