E. MANEA, E. BUDIANU, M. PURICA, C. PODARU, A. POPESCU, I. CERNICA, F. BABARADA, C.C. PARVULESCU
SnO₂ Thin Films Prepared by Sol Gel Method for “Honeycomb” Textured Silicon Solar Cells

Abstract.
This paper presents a new silicon solar cell structure obtained by texturisation of the front surface using silicon micromachining technologies. The textured surface of the solar cell reduces frontal reflectivity, in order to consequently obtain the lowest possible reflectance. Heterojunction SnO₂ :In/n silicon substrate (“honeycomb” textured) solar cells were manufactured by the sol gel method over textured p and n-type single CZ crystal silicon substrate wafers, with <100> orientation, rejected from the MOS integrated technology process. The obtained textured structures were studied by SEM and by optical and spectrophotometric measurements.

Keywords: Silicon; Texturisation; Light trapping; Solar Cells; sol-gel method.

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