ROMANIAN JOURNAL OF INFORMATION SCIENCE AND
TECHNOLOGY
Volume 3, Number 1, 2000, 95 - 101
Air-bridges for
MMICs
Dan Vasilache, Alexandru Müller, Viorel
Avramescu,
Ioana Petrini, Sergiu Iordanescu
National Institute for R&D in Microtechnologies
(IMT - Bucharest)
Abstract.
The aim of
this paper is to present the technology for air-bridges manufacturing, as
MMIC dedicated interconnection elements, characterized by low parasitic
interconnect capacitance and inductance. Air-bridges are useful to avoid
spurious propagation modes related to asymmetric coplanar waveguide
structures. |