Design of Coplanar Micromachined Microwave Circuits

ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY
Volume 3, Number 1, 2000, 63 - 74

Design of Coplanar Micromachined Microwave Circuits

Romolo Marcelli
Microwave Microsystem Technology, CNR-PSM,
Via del Fosso del Cavaliere 100, 00133 Roma - Italy
[email protected]; http://www.artov.rm.cnr.it/~psm

Flavio Giacomozzi, Benno Margesin, Mario Zen
Istituto di Ricerca Scientifica e Tecnologica,
Via Sommarive 18, 38055 Povo (TN) - Italy
E-mail: [email protected]

Sergiu Iordanescu, Alexandru Müller, Ioana Petrini, Viorel Avramescu
National Institute for R&D in Microtechnologies,
P.O. Box 38-160, 72225 Bucharest - Romania
E-mail: [email protected]

Giancarlo Bartolucci, Sandro Ciorciolini
University of Roma “Tor Vergata”, Electronic Erngineering Dept.,
Via di Tor Vergata 110 – 00133 Roma - Italy
E-mail: [email protected]

Abstract.
An approach to the design of microwave and millimeter wave coplanar waveguide (CPW) circuits is here described, stressing the advantages and the drawbacks in using a commercial software package, namely the Hewlett Packard Microwave Design System (HP-MDS). It will be shown that satisfactory results in the modeling of lumped elements and filters can be obtained by using coupled microstrips as an approximation of CPW configurations at least up to 40 GHz.