ROMANIAN JOURNAL OF INFORMATION SCIENCE AND
TECHNOLOGY
Volume 3, Number 1, 2000, 89 - 94
Non-silicon Materials
for Micromachined Presure Sensing Structures
George Simion, Nicolae.
Nitescu, Vlad Badilita,
Dan Vasilache, Alina Ion
National Institute for R & D Microtechnologies
IMT - Bucharest
Abstract.
This paper
presents a simple mathematical model of a pressure sensing structure supported on
polyimide membranes obtained by micromachining of a GaAs substrate. The meander gold on
chromium resistor is the sensing element. One can measure the resistance variation as
consequence of an applied pressure. The experimental results and the modeled data are in
good agreement. The model is relative simple and based on the fundamental elastic
relations. |