ROMANIAN JOURNAL OF INFORMATION SCIENCE AND TECHNOLOGY
Volume 3, Number 1, 2000, 89 - 94

 

Non-silicon Materials
for Micromachined Presure Sensing Structures

George Simion, Nicolae. Nitescu, Vlad Badilita,
Dan Vasilache, Alina Ion
National Institute for R & D Microtechnologies
IMT - Bucharest

Abstract.
This paper presents a simple mathematical model of a pressure sensing structure supported on polyimide membranes obtained by micromachining of a GaAs substrate. The meander gold on chromium resistor is the sensing element. One can measure the resistance variation as consequence of an applied pressure. The experimental results and the modeled data are in good agreement. The model is relative simple and based on the fundamental elastic relations.