R. MULLER, D. ESINENCO, M. KUSKO, P. OBREJA, E. MANEA,
O. LIGOR, D. APOSTOL, V. DAMIAN, M. MATEESCU, L. MOLDOVAN,
L. TCACENCO, S. D. PSOMA, A. SCHNEIDER, E. HUQ
Micro-Optical Polymeric Biosensor with Interferometric Readout
Abstract.
A relative new and simple way to realize integrated optical waveguides is to
use polymeric materials. We propose an integrated optical biosensor based on
negative photoresist SU-8 and positive photoresist. A Mach-Zehnder
architecture was chosen for the sensor. Design, simulations, using Opti-FDTD
software tools and preliminary fabrication experiments were presented.
Keywords: SU-8 waveguides, Mach-Zehnder, biosensor. |