Marioara AVRAM, Marius
VOLMER, Andrei Marius AVRAM, Jenică NEAMŢU
Integrated Magnetic Microsensors for Accurate Magnetic Field Measurement
Abstract.
The paper contains results and original contributions to magnetic field
microsensors. The sensors described in this paper were realized by using micron
and submicron microelectronic techniques and microfabrication techniques as well
as nanometric thin layers. These techniques combine very small magnetic
structures with conventional semiconductor electronics, in order to obtain
devices with new or improved functionalities. |