Results

Purchasing of a white light interferometer (WLI) for three-dimensional analysis of MEMS structures

Fogale Photomap 3D Standard - P3D 2006

 

Results of white light interferometer analysis

3D image of monolithic integrated receiver for 60GHz obtained by micromachining of GaAs module

The Schottky diode suspended on membrane detail of the monolithic integrated receiver for 60GHz obtained by micromachining of GaAs module

3D image of the Schottky diode suspended on membrane

Measuring the thickness of the Schottky metallization (click on the image to enlarge)

Measuring the high of the mesa etching for the ohmic contact
(click on the image to enlarge)

Measuring the width of the central line (click on the image to enlarge)
Induced stress (click on the image to enlarge)
Purchasing the equipment for on wafer characterization up to 110 GHz

The equipment for on wafer characterization up to 65 GHz, before the up-grade, purchased through the CEEX Programme, Module IV

The equipment after the up-grade up to 110 GHz

The vector network analyzer for 0.8...65 GHz was purchased through the CEEX Programme, Module IV. The up-grade up to 110 GHz was performed using the SIMMCA Project (Capacities Programme) and the European FP7 project MIMOMEMS

Deatils of the equipment

Aquisition of the spectrum analyser till 110 GHz

The spectrum analyser and the three mixers that allow signal analysis in the 0,1-110 GHz range, recently purchased in the SIMMCA project

The spectrum analyser (Anritsu) together with the frequency generator (Agilent) up to 110 GHz purchased in the frame of the European FP7 project MIMOMEMS

The spectrum analyser measuring a 30 GHz signal

Image from the millimeter wave characterization laboratory up to 110 GHz, able of highly advanced characterizations


S parameters measured "on wafer" in the
frequency range of 65 GHz

 

S parameter measurements for 77 GHz and 94 GHz filters and antennae for 77 GHz and 94 GHz, suspended on SiO2/Si3N4/SiO2.

Photo image of 77 GHz type A filter

S parameters for77 GHz type A filter
Photo image of 77 GHz type B filter

S parameters for 77 GHz type B filter

Photo image of 77 GHz antenna

S22 parameter for 77 GHz antenna

Photo image of 94 GHz filter structure

S parameters for 94 GHz filter

Photo image of 94 GHz antenna

S22 parameter for 94 GHz antenna

Short CPW transmission line (L =3900 μm)

S parameter for the short CPW transmission line
Long CPW transmission line (L=4900 μm)

S parameter for the slong CPW transmission line

Photo image of a test structure for anisotropic etching

S parameter of the test structure for anisotropic etching