Results
Purchasing of a white light interferometer (WLI) for three-dimensional analysis of MEMS structures |
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Fogale Photomap 3D Standard - P3D 2006 |
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Results of white light interferometer analysis |
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3D image of monolithic integrated receiver for 60GHz obtained by micromachining of GaAs module |
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The Schottky diode suspended on membrane – detail of the monolithic integrated receiver for 60GHz obtained by micromachining of GaAs module |
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3D image of the Schottky diode suspended on membrane |
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Measuring the thickness of the Schottky metallization (click on the image to enlarge)
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Measuring the high of the mesa etching for the ohmic contact |
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Measuring the width of the central line (click on the image to enlarge)
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Induced stress (click on the image to enlarge) |
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Purchasing the equipment for on wafer characterization up to 110 GHz |
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The equipment for on wafer characterization up to 65 GHz, before the up-grade, purchased through the CEEX Programme, Module IV |
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The equipment after the up-grade up to 110 GHz |
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The vector network analyzer for 0.8...65 GHz was purchased through the CEEX Programme, Module IV. The up-grade up to 110 GHz was performed using the SIMMCA Project (Capacities Programme) and the European FP7 project MIMOMEMS |
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Deatils of the equipment |
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Aquisition of the spectrum analyser till 110 GHz |
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The spectrum analyser and the three mixers that allow signal analysis in the 0,1-110 GHz range, recently purchased in the SIMMCA project |
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The spectrum analyser (Anritsu) together with the frequency generator (Agilent) up to 110 GHz purchased in the frame of the European FP7 project MIMOMEMS |
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The spectrum analyser measuring a 30 GHz signal |
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Image from the millimeter wave characterization laboratory up to 110 GHz, able of highly advanced characterizations |
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S parameter measurements for 77 GHz and 94 GHz filters and antennae for 77 GHz and 94 GHz, suspended on SiO2/Si3N4/SiO2. |
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Photo image of 77 GHz type A filter |
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S parameters for77 GHz type A filter |
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Photo image of 77 GHz type B filter |
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S parameters for 77 GHz type B filter |
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Photo image of 77 GHz antenna |
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S22 parameter for 77 GHz antenna |
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Photo image of 94 GHz filter structure |
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S parameters for 94 GHz filter |
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Photo image of 94 GHz antenna |
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S22 parameter for 94 GHz antenna |
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Short CPW transmission line (L =3900 μm) |
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S parameter for the short CPW transmission line |
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Long CPW transmission line (L=4900 μm) |
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S parameter for the slong CPW transmission line |
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Photo image of a test structure for anisotropic etching |
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S parameter of the test structure for anisotropic etching |
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