Characterization Tools

Field Emission un Scanning Electron Microscope (FEG-SEM) - Nova NanoSEM 630 (FEI Company, USA) [...more details]

Scanning Electron Microscope - Vega II LMU @ Pattern Generator - PG Elphy Plus (TESCAN s.r.o , Czech Republic @ Raith, Germany) [...more details]

Scanning Probe Microscope - NTEGRA Aura (NT-MDT Co., Russia) [...more details]

Scanning Near-field Optical Microscope - Witec alpha 300S (Witec, Germany) [...more details]

Scanning Electrochemical Microscope - ElProScan (HEKA, Germany) [...more details]

Nanomechanical Characterization equipment - Nano Indenter G200 (Agilent Technologies, USA) [...more details]

X-ray Diffraction System (triple axis rotating anode) - SmartLab - 9kW rotating anode, in-plane arm (Rigaku Corporation, Japan) [...more details]

High Resolution Raman Spectrometer - LabRAM HR 800 (HORIBA Jobin Yvon, Japan) [...more details]

Spectroscopic ellipsometer - SE 800 XUV (SENTECH Instruments, Germany) [...more details]

Combined Time Resolved and Steady State Fluorescence Spectrometer - FLS920P (Edinburgh Instruments, UK) [...more details]

UV-VIS-NIR Spectrophotometer - SPECORD M42 (Zeiss, Germany) [...more details]

Fourier–Transform Infrared Spectrometer - Tensor 27 (Bruker Optics, Germany) [...more details]

UV-Vis-NIR Thermo-Electric Cooled Fiber Optic Spectrometer - AvaSpec-2048 TEC (Avantes, The Netherlands) [...more details]

NIR Spectrometer - AvaSpec NIR256-2.2 (Avantes, The Netherlands) [...more details]

White Light Interferometer - Photomap 3D (FOGALE nanotech, France) [...more details]

Refractometer for layer thickness measurements - NanoCalc-XR [...more details]

Electrochemical Impedance Spectrometer - PARSTAT 2273 (Princeton Applied Research, USA) [...more details]

Voltammetry and polarography analysis system - TRACELAB 50 (Radiometer Analytical, France)

Dynamic Electrochemical Laboratory - VoltaLab 40: PGZ301 Universal Potentiostat/ Galvanostat  & VoltaMaster 4 software (EIS, Voltammetry) (Radiometer Analytical, France)

Probers, on-wafer; electrical characterization

Microwave network analyzer (0.04-110 GHz) with Manual Probing Station - Lightning 37397D VNA/Anritsu; PM5/Suss MicroTec (Anritsu, Japan; Suss MicroTec, Germany) [...more details]

Wafer Probing Station - Easyprobe EP4  (Suss MicroTec, Germany) [...more details]

Semiconductor Characterization System (DC) with Wafer Probing Station - 4200-SCS/C/Keithley Easyprobe EP6/ Suss MicroTec (Keithley Instruments, USA; Suss MicroTec, Germany) [...more details]

Semiconductor Characterization System - 4200-SCS, C-V 3532-50, DMM 2700-7700,  2002, 6211-2182 (Keithley Instruments, USA) [...more details]


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Last update: July, 2014