UPGRADING THE INFRASTRUCTURE FOR THE LABORATORY OF DIELECTRIC AND
CONDUCTIVE THIN FILMS DEPOSITION FOR MICRO AND NANO-MANUFACTURING
(DDC-LAB)
Services:
- Plasma deposition for CVD oxides: PSG, BSG, BPSG;
- Dielectric layers manufacturing;
- Sacrificial layers manufacturing, using surface micromachining;
- Conductive layers deposition, using the InkJet printing method;
- Training for students and PhD students.
The services that we offer in this project are free of charge if performed within joint research projects (where IMT is a consortium partner). Direct customers will be charged for the specific services, according to their needs.
