¤ Results 2023

• The energy harvester system has been characterized and tested in laboratory (Fig. 2023.1) and relevant conditions (Fig. 2023.2).

Fig. 2023.1. Measurements in laboratory conditions

Fig. 2023.2. Measurements in relevant conditions

• A DC stabilized voltage of 2.5V has been obtained at an acceleration of 2.5g and a resonant frequency of 84Hz (Fig. 2023.3).

Fig. 2023.3. The energy harvesting system: 1 – MEMS harvesters; 2 – Electronics; 3 – Supercapacitor in CR2032 capsule

• The energy harvester fabrication technology has been validated and tested in relevant conditions

¤ Results 2022

• The energy harvester device was fabricated using specific MEMS technologies (Fig. 2022.1a).
• The piezoelectric layer was developed and characterized (Fig. 2022.1b).

Fig. 2022.1. (a) – The fabricated energy harvester; (b) – Device during polling of piezoelectric layer

• The device specifications were verified using different methods and equipment (Fig. 2022.2).

Fig. 2022.2. Verification of device’s specifications

• An optimized version of the device has been designed and simulated (Fig. 2022.3).

Fig. 2022.3. Optimized version of the device

• Test methods for the integrated system have been designed.

¤ Results 2021

• The initial specifications of the application have been defined by measuring the vibrations in different points of interest and obtaining information about the accelerations and frequencies (Fig. 2021.1).

Fig. 2021.1. Example of measurements of points of interest and the obtained data

• Simulations and initial design of test structures and piezoelectric power generator were performed (Fig. 2021.2).

• The masks were technologically designed and manufactured (Fig. 2021.3).

• Test methods for the power generator have been designed.

National Institute for Research and Development in Microtechnologies- IMT Bucharest
Project director: Dr. Carmen MOLDOVAN
E-mail: carmen[dot]moldovan[at]imt[dot]ro
Tel:  +40-21-269.07.70; +40-21-269.07.74;
Fax: +40-21-269.07.72; +40-21-269.07.76;
Website: www.imt.ro